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Modelling Of Microfabricaiton Systems (Hb) at Meripustak

Modelling Of Microfabricaiton Systems (Hb)

Books from same Author: Nassar R.

Books from same Publisher: Springer

Related Category: Author List / Publisher List

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    • General Information  
    Author(s)Nassar R.
    PublisherSpringer
    ISBN9783540002529
    Pages270
    BindingHardback
    LanguageEnglish
    Publish YearAugust 2003

    Description

    Springer Modelling Of Microfabricaiton Systems (Hb) by Nassar R.

    This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.