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Metal Impurities In Silicon-Device Fabrication at Meripustak

Metal Impurities In Silicon-Device Fabrication

Books from same Author: GRAFF K

Books from same Publisher: Springer

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    • General Information  
    Author(s)GRAFF K
    PublisherSpringer
    EditionGRAFF K
    ISBN9783540642138
    Pages270
    BindingPaperback
    LanguageEnglish
    Publish YearMarch 2000

    Description

    Springer Metal Impurities In Silicon-Device Fabrication by GRAFF K

    This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables.show more