Description
Taylor & Francis Ltd Fundamentals Of Microfabrication And Nanotechnology Vol 1 3Rd Edition 2011 by Marc J. Madou
Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms. Topics include:Crystallography and the crystalline materials used in many semiconductor devicesQuantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMSSingle crystal Si properties that conspire to make Si so importantOptical properties of bulk 3D metals, insulators, and semiconductorsEffects of electron and photon confinement in lower dimensional structuresHow evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonicsMetamaterials and how they could make for perfect lenses, changing the photonic field foreverFluidic propulsion mechanisms and the influence of miniaturization on fluid behaviorElectromechanical and optical analytical processes in miniaturized components and systems The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS. Historical Note: The Ascent of Silicon, MEMS, and NEMS CrystallographyIntroductionBravais Lattice, Unit Cells, and the BasisPoint Groups and Space GroupsMiller IndicesX-Ray AnalysisReciprocal Space, Fourier Space, k-Space, or Momentum SpaceBrillouin ZonesNothing Is PerfectAcknowledgmentsAppendix 2A: Plane WaveEquationsQuestionsFurther ReadingReferenceQuantum Mechanics and the Band Theory of SolidsIntroductionClassical Theory Starts FalteringQuantum Mechanics to the RescueBeyond Schroedinger's EquationSilicon Single Crystal Is Still KingIntroductionSi CrystallographySingle-Crystal Structure and ConductivitySingle-Crystal Si GrowthDoping of SiOxidation of SiliconSi-Based Electronic DevicesPhysicochemical Properties of SiAppendix 4A: Some Properties of Error Functions and Complementary Error FunctionsQuestionsFurther ReadingReferencesPhotonicsIntroductionThe Nature of LightDiffraction and Image Resolution RefractionReflectance and Total Internal ReflectanceLight PolarizationMaxwell's EquationsBeyond MaxwellOptical Properties of MaterialsLight Interaction with Small ParticlesComparing Photons with Electrons-Photonic CrystalsThe - Quadrant and MetamaterialsLasersQuestionsReferencesFluidicsIntroductionMacroscale Laws for Fluid FlowBreakdown of Continuum Theory in FluidicsForces at InterfacesMixing, Stirring, and Diffusion in Low Reynolds Number FluidsChemical Reactions in Microchambers-MicroreactorsFluid PropulsionElectrowettingCentrifugal Fluidic Platform-CDFluidicsScaling in Analytical SeparationEquipmentAcknowledgmentsQuestionsFurther ReadingReferencesElectrochemical and Optical Analytical TechniquesIntroduction Intermolecular Forces ElectrochemistryOptical SpectroscopyComparison of Optical versusElectrochemical SensorsQuestionsReferences