Micro Electromechanical Systems Practical Lab Manual (Hb 2025) at Meripustak

Micro Electromechanical Systems Practical Lab Manual (Hb 2025)

Books from same Author: Goel S

Books from same Publisher: IEEE Press

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  • General Information  
    Author(s)Goel S
    PublisherIEEE Press
    ISBN9781394229833
    Pages168
    Publish YearFebruary 2025

    Description

    IEEE Press Micro Electromechanical Systems Practical Lab Manual (Hb 2025) by Goel S

    Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications. The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject.